To measure low-concentrations of gases with high sensitivity using FT-IR, it can be necessary to remove CO2 and H2O from the instrument and sample compartment as well as the use of a long path gas cell. JASCO offers a high sensitivity full-vacuum gas measurement system with a wide spectral range DLATGS detector and/or a selection of high sensitivity MCT detectors for rapid measurement applications.
System Features
- Eliminates the effects of water vapor and CO2
- Stable long-term measurements using sealed optics and an evacuated light path
- Detects very low concentrations of gases
- Integrated detectors to cover various application requirements
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Semiconductor Brochure. Click here to view the Semiconductor Application Notebook.