NRS-3000 Series Raman Spectrometers
The NRS-3000 Series Raman spectrometer is an integrated instrument system utilizing laser excitation to produce Raman scattering unique to the sample. A non-destructive, non-contact technique without requirements for special preprocessing or sample handling, Raman spectra can also be collected while varying sample temperature and/or pressure. The NRS-3000 Series can provide information about molecular species, types of atomic groups, and molecular crystal structures based on analysis of the Raman spectra. In addition, information about crystal axes, crystallinity, and molecular orientations can be easily obtained using laser polarization methods. Measurements on the micron scale are easily accomplished by utilizing the various available microscope objectives, further focusing the laser excitation source. In the semiconductor field, the system can be used for applications such as evaluating the stress of Si device components at the microscopic level, managing DLC film quality, and analyzing contaminants on semiconductor wafer material.
System Features
• High throughput aberration-corrected single monochromator
• One to three holographic gratings on an automated turret
• High quality on-screen sample view and image capture
• Automated mapping stage with auto-focusing option
Molecular and crystallinity data
Elemental analysis techniques only offer data about the sample’s form and elemental composition. Raman spectroscopy, however, can be used to characterize and identify molecular species, offer functional group information, and provide evidence of sample crystal structure. Using laser polarization, it can also provide insight into the crystal structure, sample crystallinity, and molecular orientation of solid samples.
Non-destructive, non-contact analysis
No elaborate sample preparation is required, simply expose a specific area of the sample to the laser beam and collect the Raman data. Analysis of liquid or solid samples can often be conducted in a clear glass sample vial, then the sample used for other analysis techniques. Raman spectra can also be collected in-situ while varying sample conditions such as temperature, pressure or chemical composition, etc.
Microscopic analysis
Inherently a micro technique, the macro sampling option provides a laser spot size of ~50 microns, analyzing a small portion of a larger sample. The various microscope objectives can provide micro-Raman measurements for a sample area as small as 1 micron while CCD video observation provides for precise positioning of the smallest sample.
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