Request Quote

or Call (800) 333 - 5272

Confocal Fluorescence Detector

JASCO's Confocal fluorescence detector can be used to determine the depth of the fluorescent contaminant without destroying the crucible.

Confocal Fluorescence Detector

System Description

Fluorescent compounds in quartz crucibles used for silicon crystallization can contaminant the semiconductor material. These contaminants migrate through the quartz during the heating and cooling cycles, eventually bringing the fluorophores to the surface and contaminating the molten silicon. Traditionally, a representative crucible is destroyed to determine the depth of the fluorescent material.

By gradually altering the source focal point and simultaneously recording the fluorescence response and source scattering, a fluorescence depth profile can be created, indicating the precise depth of the fluorescent contaminants.

System Features

  • A non-destructive, non-contact method for the detection of fluorescent contaminants in quartz or glass
  • Simultaneous measurement of the fluorescence and light scattering for calculation of the fluorescence depth profile. The distance of the fluorescent contaminant from the surface can be readily calculated.

Related Instruments

Absolute Reflectance

Absolute Reflectance The absolute reflectance measurement system automates the measurement of the spectral properties, film thickness, angle variation or other characteristics of...


Ellipsometer Ellipsometry is a method for determining the refractive index and extinction coefficients of a sample by measuring the change in...

Film Thickness

Film Thickness The thickness of the epitaxial layer, substrate, etching (residual layer), liquid crystal cell gap, and other semiconductor layers dramatically impacts...


Microspectrophotometer The MSV-5000 microscope system incorporates a double-beam scanning spectrophotometer for optimum measurements in the UV-Vis to NIR region (200-2700 nm).

Near Field Scanning

Near Field Scanning The NFS Series of scanning near-field optical microspectrometers have been optimized as a new solution for nanotechnology applications.

Quantum Efficiency

Quantum Efficiency A quantum efficiency measurement system for solid samples integrates the spectrofluorometer with an integrating sphere for fluorescence emission and a...

Raman Spectrometers

Raman Spectrometers The NRS Series of bench top are based on JASCO’s proven technology emphasizing sensitivity, reliability, and ease of operation...

Supercritical Fluid

Supercritical Fluid Perfluoropolyether (PFPE) is a lubricant widely used in many aerospace, vacuum, electronic and semiconductor applications due to its excellent chemical...


Vacuums The V-1000 was designed to evaluate optical properties in the wavelength range between 115 and 300 nm.

Download Catalog

Download Catalog

Get more information
by downloading our latest catalog


Application Notes Library

Application Notes Library

Check out JASCO's application notes for a wide range of industries.

View All

Training for FT-IR Sample Analysis

Training for UV-VIS-NIR

October 24-25, 2016

Learn More